5. ConfabPilot: Generative AI based Flow Design¶
Semiconductor fabrication industry and foundry automation tools have relied on statistical process control (SPC), design of experiments (DOE) and yield modeling techniques which are fairly manual and depend on specialized tools and deep knowledge [1,2]. Such complexity of DOE and process flow design lead to under utilization of process flow experimentations, reduced inter- disciplinary tool uses, and sub-optimal outcomes for process development teams through using one-factor at a time (OFAT). In this article we report, and demonstrate, an integrated process flow and experiment design tool with generative AI system to accelerate flow designs and generating DOEs.
The unique innovation of our tool is to use the the emerging technology of large language models (LLM), like BERT or ChatGPT [4,5] and science of causality [3] to enable generation of process flows with a description. Our tool generates a process flow or a DOE from a description by integration of the vanilla LLMs with PanMo Confab engine to provide a first draft of process flow or design of experiments from a existing process flow, and a large repository of process related data fine-tuned for the application of interest - memory, logic, solar cells, LED, bio/nano tech., etc.
We believe this novel technology reduces barriers of entry for PIs and researchers in the industry alike to explore process-flows using new instrumentation which are not traditionally available to them due to complexity of engagement and provide estimates of operation in quick manner. This tool also addresses problem of reducing complexity barrier for creating Flows/DOEs by using common language to extract factors, levels and response variables from a textual description of the process.
5.1. Usage¶
Two types of Process Flow - Modular and Steps based Process Flow are supported in the Generative AI support.
Click on “Generative AI “ in the sidebar to see the option.
5.2. Generate Process Flow (Multiple Steps)¶
To generate a process flow with just one module you can follow this direction.
Choose to generate the multiple steps based process flow and enter your prompt,
If the generated steps are OK you can accept the flow and continue to import it, or regenerate like in earlier action,
Upon accepting the flow you will import it into the Panmo Confab system,
5.3. Generate Process Flow (Multiple Modules)¶
Choose to generate the multiple modules, each with one or more steps, based process flow and enter your prompt,
If the generated modules are OK you can accept the flow and continue to import it, or regenerate like in earlier action,
Upon accepting the flow you will import it into the Panmo Confab system,
